PROCEEDINGS


 Technical support & inquiries

 Research Publishing (S) Pte. Ltd.
t:+65-6492 1137
e:enquiries@rpsonline.com.sg

Table of contents



Monday, 2 December 2024


SessionMicro / Nanomachining I (Ultra or nano-precision machining / FIB and e-beam based fabrication)
Date/TimeMonday, December 2, 2024 / 13:25 – 14:55
RoomStudio 1&2
Session ChairsProf Jiwang YAN and Prof Hao WANG

O-06-0003

Effects of Grain Size on Removal Mechanism of Brittle Polycrystalline Materials in Laser Assisted Diamond Turning
Keliang Tao, Kaiyuan You, Wei Wang, Ping Yang, Jingqi Xiong and Jiexiong Ding

O-06-0025-A

Material Removal Behavior and Model for Chemically Enhanced High-Shear and Low-Pressure Grinding of Lithium Niobate Crystals
Yebing Tian, Chengwei Wei, Xinyu Fan and Zhuang Meng

O-06-0034

A Cutting Strategy with Continuously Varying Stepover to Suppress the Diffraction Effect of Ultraprecision Machined Surfaces
Yangqin Yu and Xinquan Zhang

O-06-0036

Optimizing Slow Tool Servo Machining of Microlens Arrays Through Data-Driven Tracking Error Prediction and Trajectory Replanning
Zhiyue Wang, Zhenhua Jiang, Hao Wu, Yangqin Yu and Xinquan Zhang

O-06-0037

Parallel Tool Servo Turning of Microstructured Surfaces Using Complementary Filters
Hao Wu, ZeLong Jia, MingJun Ren, XinQuan Zhang and LiMin Zhu

SessionMicro / Nanomachining II (Ultra or nano-precision machining / FIB and e-beam based fabrication)
Date/TimeMonday, December 2, 2024 / 15:35 – 16:50
RoomStudio 1&2
Session ChairsProf Jiwang YAN and Prof Hao WANG

O-06-0097-A

Function/Performance Oriented Design and Manufacturing
Longqiu Li, Junmin Liu, Rencheng Zhuang, Dekai Zhou and Xiaocong Chang

O-06-0106

Improvement of the Machinability of Silicon by Multiple Implantations of Different Ions for Ultra-Precision Micro-Cutting
Yi Tan, Te Zhao, Zejia Zhao and Suet To

O-06-0114-A

Effects of Chatter on Workpiece Surface Topography During Diamond Turning
Dr Denghui LI

O-06-0119

An Investigation of Surface Uniformity, Chip Formation and Microhardness of Magnetic Field Assisted Diamond Turning of Titanium Alloys
Jiuxing Tang, Suet To and Wai Sze Yip

O-06-0135-A

Fundamental Theory of Non-Uniform Residual Tool Marks in Ultra-Precision Diamond End-Flycutting
Jianpeng Wang and Suet To

SessionAtomic and Close-to-Atomic Scale Manufacturing (ACSM) I
Date/TimeMonday, December 2, 2024 / 13:25 – 14:55
RoomConcorde 2 Ballroom
Session ChairsProf Rong CHEN and Prof Aminul ISLAM

O-02-0013

Atomic Precision Material Removal Using AFM under Electric Fields
Mr Ning HUANG

O-02-0019

Fast Fabrication of Microlens Array on Single Crystal Si by In-Situ Laser and Elliptical Vibration Hybrid Diamond Cutting
Shanyi Ma, Yingjie Sun, Yujiang Lu, Xinhuan Li, Jianguo Zhang and Jianfeng Xu

O-02-0023

Study on Ultra-Precision Water Dissolution Polishing of KDP Crystals
Jiyu Pan, Peng Lyu, Ze Liu, Zebin Xia and Fengzhou Fang

O-05-0139-A

High-Performance and Ultra-Precision Micro/Nano Molds Electroforming with Atomic Precision
Honggang Zhang, Mingyuan He, Kai Chen and Jingyi Li

SessionAtomic and Close-to-Atomic Scale Manufacturing (ACSM) II
Date/TimeMonday, December 2, 2024 / 15:35 – 16:50
RoomConcorde 2 Ballroom
Session ChairsProf Rong CHEN and Prof Aminul ISLAM

O-02-0024

Study of the Influence of pH on NiP Ultra-Precision Polishing
Zebin Xia, Peng Lyu, Ze Liu, Jiyu Pan and Fengzhou Fang

O-02-0045

Impact of Polyurethane Elasticity on the Gap between Polishing Tool and Work Surface in Elastic Emission Machining Systems
Ze Liu, Zebin Xia, Jiyu Pan, Peng Lyu and Fengzhou Fang

O-02-0065

Analysis and Prediction of Surface Topography Evolution in Laser Recovery of Monocrystalline Silicon
Weiqi Huang, Sishuo Yang, Jianfeng Xu and Junfeng Xiao

O-02-0090

An Experimental Investigation on High-Precision and Damage-Free Processing of Diamond
Song Yuan and Benny Chi Fai Cheung

O-02-0099

Atomic Removal via Mechanochemical Reactions
Yang Yin, Lei Chen and Linmao QianD

SessionMicro / Nano-patterning, Micro-featured Surfaces & Surface Modification I
Date/TimeMonday, December 2, 2024 / 13:25 – 14:55
RoomGallery 1,2&3
Session ChairsProf Benny C.F. CHEUNG and Prof Jining SUN

O-08-0053

Friction and Wear Analysis of Milled Surfaces at the Micro-Nano Scale
Jianing Wang and Song Zhang

O-08-0056

A Sapphire Nanostructure Fabrication Method Based on Friction-Induced Hydroxyl Dehydration Condensation
Jinhao Zhang, Yinhui Wang and Hui Deng

O-08-0057

Fabrication of Groove-With-Protrusion Structures by Ultrasonic Vibration-Assisted Burnishing Using a Laser-Grooved Tool
Asuka Otani and Jiwang Yan

O-08-0061

Laser Interference Lithography with a Spatial Light Modulator for Arbitrary Pattern Fabrication
Nozomu Takahiro and Yuki Shimizu

O-08-0102-A

Ultra-precision surface treatment of directionally additive manufactured Al-Si alloy
Pavithran K, Jibin Boban, Afzaal Ahmed and Dennis Wee Keong Neo

SessionMicro / Nano-patterning, Micro-featured Surfaces & Surface Modification II
Date/TimeMonday, December 2, 2024 / 15:35 – 16:50
RoomGallery 1,2&3
Session ChairsProf Benny C.F. CHEUNG and Prof Jining SUN

O-08-0083

Enhancing Oxide Growth Rate in Rolling Nanoele ctrode Lithography (RNEL) Process
Rashed Md. Murad Hasan, Zhengjian Wang Jian Gao, Wenkun Xie and Xichun Luo

O-08-0113

Effect of Physical Properties on Micro-Structured Surfaces for Hydrophilic Control
Akira Kakuta, Shuma Hozyo and Keisuke Kobayashi

O-08-0118-A

Superhydrophobic Surfaces of 316L Austenitic Stainless Steel Processed by Femtosecond Laser Texturing
Dr Shaoyun ZHOU

O-08-0134-A

Study on the Surface/Interface Modification and Manufacturing of Tungsten Carbide Mold Material
Dr Weijia GUO

O-15-0133-A

A 2D-imageI-based 3D Measurement for Prefabricated Prefinished Volumetric Construction
Chaoyu Dong

SessionOther Technologies Associated with Manufacturing I
Date/TimeTuesday, December 3, 2024 / 09:50 – 11:05
RoomStudio 1&2
Session ChairsProf Sung-Hoon AHN and Prof Lei CHEN

O-17-0126

A non-resonant piezoelectric linear motor with alternating normal contact force
Prof Yin WANG

O-17-0030

Evaluation of Measurement Properties Depending on Optical Coupling of Whispering Gallery Mode (WGM) Resonance -- Based Diameter Measurement
Yushen Liu, Shuzo Masui, Masaki Michihata and Satoru Takahashi

O-17-0031

Tool Influence Functions of Sapphire Wheel Polishing Tools Based on Center Supply Polishing Liquid
Chunliang Qi, Qingliang Zhao, Sheng Wang and Jianbo Zhao

O-06-0074

Machinability of Hydrophobic Acrylic Polymer for Customized Intraocular Lenses
W. Wang, O. Riemer, K. Rickens, T. Eppig and B. Karpuschewski

O-14-0112

High Precision Manufacturing of Small Aperture Double Aspheric Shaping Element
Shiyu Chen, Yang Ou, Cheng Huang, Wenwen LU and Yupeng Xiong

SessionOther Technologies Associated with Manufacturing II
Date/TimeTuesday, December 3, 2024 / 12:15 – 13:30
RoomStudio 1&2
Session ChairsProf Sung-Hoon AHN and Prof Lei CHEN

O-17-0055

Flatness Measurement of Semiconductor Wafers Based on Frequency Scanning Interferometry
Weisheng Cheng, Xuanzong Wu, Zexiao Li, Bo Zhang, Shuangxiong Yin and Xiaodong Zhang

O-17-0058-A

Six Degrees of Freedom Heterodyne Grating Interferometry with Close-totomic Accuracy
Can Cui, Pengbo Zhao, Lifu Liu, Menghan Yang and Xinghui Li

O-17-0115

Flexible Fabrication Of Microlens Array Surface on Mold Steel by Magnetic Field-Assisted Self-Assembly Electrode
K.S. Li, C.J. Wang, C.F. Cheung and F. Gong

O-17-0125-A

Optimization of Polycarbosilane-Based Binding Agents for the Manufacture of SiC Micro-Features
Xiao Da Terrence Fu, Ganesh Kumar Meenashisundaram, Subramanian Sundarrajan, Seeram Ramakrishna and Senthil Kumar Anantharajan

O-10-0033

Frequency Domain Analysis of Surface Errors Based on Imaging Performance
Shan Wu, Jinshi Wang and Fengzhou Fang

O-10-0082-A

Linearized EUV Mask Optimization Based on the Adjoint Method
Pinxuan He, Jiamin Liu, Honggang Gu, Hao Jiang and Shiyuan Liu

SessionProcess Monitoring and Quality Control
Date/TimeTuesday, December 3, 2024 / 15:20 – 16:20
RoomStudio 1&2
Session ChairsProf Sung-Hoon AHN and Prof Lei CHEN

O-15-0001

Characterization and Enhancement of a Multi-Layer Diamond Tool for Self-Sensing of Cutting Temperature
Liu Shiquan, An Liang, Li Hui, Fu Xiang and Chen Yuan-Liu

O-15-0041

Development of an Optimized Smart Tool Holder Using Symmetrical Structure for Three Axis Cutting Force Measurement in Diamond Cutting
Zhongwei Li, Huanbin Lin, Liang An and Yuan-Liu Chen

O-15-0052

Ultra-Precision Cutting on Thin-Walled Cylinder with Deformation Estimation and Compensation Method
Kaiyang Xia and Yuanliu Chen

O-15-0076

An Online Surface Topography Simulation Model for Single-point Diamond Turning Considering Relative Tool-workpiece Vibration and Swelling Effect
Gen-Shen Liu, Yuan-Liu Chen and Bing-Feng Ju

O-15-0124-A

Smart Micro-milling: Automated Tool Wear Measurement and Machine Learning for Wear Prediction
Darren Low Wei Wen, Hong Geok Soon and A. Senthil Kumar

SessionLaser Micro / Nano Materials Processing
Date/TimeTuesday, December 3, 2024 / 17:00 – 18:00
RoomStudio 1&2
Session ChairsProf Sung-Hoon AHN and Prof Lei CHEN

O-04-0026

Investigation of Infrared Femtosecond Laser Processing of Bulk MoS2 at the Atomic Scale
Dr Huimin QI

O-04-0050

Scalable and Cost-Effective Nanowire Fabrication Using Ultrafast Laser with Optical 4f Laser Energy Modulation
Chong Chen, Jingwen Ran, Ziran Chen and Xiaokang Liu

O-04-0063

Effect of Gaseous Environment on Powder Particle Spattering During Laser Powder Bed Fusion Process
Liwei Chen, Yoshiki Sakai, Yanlin Song and Keisuke Nagato

O-07-0098-A

A Magnetic Field-Driven Multi-Functional ``Medical Ship'' for Intestinal Tissue Collection in Vivo
Junmin Liu, Zhiyuan Huang, Xiaocong Chang, Dekai Zhou and Longqiu Li

SessionAtomic and Close-to-Atomic Scale Manufacturing (ACSM) III
Date/TimeTuesday, December 3, 2024 / 09:50 – 11:05
RoomConcorde 2 Ballroom
Session ChairsProf Kazuya YAMAMURA and Prof Jufan ZHANG

O-02-0100

Molecular Dynamics Simulation of Tool Wear in Elliptical Vibration Cutting: Case Study on 3C-SiC
Changlin Liu, Jinyang Ke, Jianfeng Xu and Suet To

O-02-0121-A

Highly Efficient Plasma Etching to Achieve Atomically Smooth and Damage-Free Surface
Yongjie Zhang, Yuxi Xiao and Hui Deng

O-02-0131-A

Unraveling the Material Removal and Step Morphology Evolution Mechanism of Plasma Processed Sapphire Surfaces
Yinhui Wang, Hui Deng and Shenglong Liang

O-15-0051

A Method for In-Process Cutting Force and Temperature Monitoring Using Cutting Tool Itself in Ultra-Precision Machining
Liang An, Shiquan Liu and Yuan-Liu Chen

SessionNano Characterization and Tools
Date/TimeTuesday, December 3, 2024 / 12:15 – 13:30
RoomConcorde 2 Ballroom
Session ChairsProf Kazuya YAMAMURA and Prof Jufan ZHANG

O-11-0059

Optical Angle Sensor Based on Laser Autocollimation with a Photodiode Array and a Multi-Longitudinal-Mode Laser
Keita Nakaoka and Yuki Shimizu

O-11-0060

An Optical Head with Littrow Configuration for Measurement of the Pitch Deviation of a Diffraction Grating
Yuya Yamazaki, Tomoki Kitazume and Yuki Shimizu

O-11-0094

Investigation on Measurement Stability of Fabry-P\'erot Angle Sensor using Mode-locked Femtosecond Laser
Dong Wook Shin, Ryo Sato, Hiraku Matsukuma and Wei Gao

O-11-0103

Interlayer Friction Behavior of Molybdenum Ditelluride by AFM Nano-Manipulation
Xinfeng Tan, Lina Zhang, Dan Guo and Jianbin Luo

O-11-0136-A

New Insights Into Laser Damage Mechanisms of Optics by Exploring the Evolution of Intrinsic Defects Before and After Intense Laser Irradiations
Wenyu Ding and Suet To

O-02-0122

Atomic Observation of Structural Evolution of Turning Aluminum Surface During Ion Beam Bombardment
Chunyang Du, Shanyong Chen, Cheng Huang and Junfeng Liu

SessionUltra-precision Manufacturing Systems
Date/TimeTuesday, December 3, 2024 / 15:20 – 16:20
RoomConcorde 2 Ballroom
Session ChairsProf Kazuya YAMAMURA and Prof Jufan ZHANG

O-16-0006

Error Characteristic Analysis of a Standard Model for Geometric Metrology Digital Measuring Instruments
Jing Yu, Ke-ying Yang, Hang Yu, Ming Kong and Wei-sheng Zhao

O-16-0095

On-line Automatic Workpiece Centering Using an Impact Actuator for Ultra-Precision Turning
Seung-Kook Ro, Gyungho Khim and Doo-Sun Choi

O-03-0011

Investigation on Bolt Tightening Strategy for Precision Machine Tool Guideway Considering Linear Accuracy
Tianxiang Wang, Yanming Pan , Jianfeng Li and Song Zhang

O-15-0132-A

Scalable 3D X-ray Computed Tomography Measurement and Accuracy for Metal Additive Manufacturing
Chaoyu Dong

O-01-0108-A

Phase Transition Structural Superlubricity
Bao Jin, Chenhui Zhang, Yongyong He and Jianbin Luo

SessionOptical Machining & Measurement I
Date/TimeTuesday, December 3, 2024 / 09:50 – 11:05
RoomGallery 1,2&3
Session ChairsProf Shuming YANG and Dr Ryo SATO

O-14-0007

High Precision Grinding of Large-Aperture Off-Axis Aspheric Mirror With Form-Damage Controlling Methodology
Prof Guoyan SUN

O-14-0012

Form Measurement of Hand-Scraped Surfaces Using an Abramson Oblique-incident Interferometer
So Ito, Takumi Yamagishi, Kenta Matsumoto, Kimihisa Matsumoto and Kazuhide Kamiya

O-14-0021

Principle Verification of Two-axis Displacement Measurement System to Compensating Nonorthogonality Error Using Single Grating Scale and Littrow Configuration
Masaki Michihata, Souki Fujimura, Shuzo Masui and Satoru Takahashi

O-14-0038

Polishing-Induced Generation of Intrinsic Defects of Fused Silica
Qing Mu and Ping Zhou

O-14-0042

Model-independent Wavefront Aberration Measurement of Multi-surface Optical Systems
Lei Liu, Hongshun Zhang, Xianlei Liu and Xiaodong Zhang

SessionAdvanced Nanomaterials
Date/TimeTuesday, December 3, 2024 / 12:15 – 13:30
RoomGallery 1,2&3
Session ChairsProf Shuming YANG and Dr Ryo SATO

O-01-0014

Specialized SiO2 Multilayered Coatings for Macroscopic Optical Force Sensors
Siyu Huang, Chunyang Gu, Tan Chen and Fengzhou Fang

O-01-0128-A

Chemical Vapor Depostion (CVD) -- Driven Cu2O@Cu3P Heterostructure electrode for Energy Storage Applications
Jongwoo Hong and Seong Chan Jun

O-05-0020

Defect-Free Replication of Polymeric Micro Structures Using Novel Ni-PTFE Nanocomposite Moulds
Tianyu Guan and Nan Zhang

O-05-0091-A

Micro/Nano Glass & Metal Forming using Vitreous Carbon Mold
Ju Wan Kim, Su Yeon Seok, Young Kyu Kim and Seok-min Kim

O-06-0088

Surface Quality Enhancement of Metallic Tubes by A Novel Flocking-Fiber Coated Magnetic Tool
Zhanjie Zhang, Chongrui Wang and Jiong Zhang

O-10-0044

Modelling for the Micro-Interactions of Grit-Workpiece in Ultrasonic Vibration Grinding of Fused Silica Glass
Cheng Huang, Yupeng Xiong, Yifan Dai, Silin Guo, Hao Hu and Shanyong Chen

O-01-0140

A Review of Recent Advancements in the Fabrication of Astronomical Telescopes
Zhe Zhang, Weihao Ma, Shuxin You, Zhichao You and Xinquan Zhang

SessionOptical Machining & Measurement II
Date/TimeTuesday, December 3, 2024 / 15:20 – 16:20
RoomGallery 1,2&3
Session ChairsProf Shuming YANG and Dr Ryo SATO

O-14-0043

Integrated High-Precision Measurement of Multi-Freeform Surface Prisms
Chen Li, Shibin Xiao, Changshuai Fang, Zexiao Li and Xiaodong Zhang

O-14-0054

Fabrication and Alignment of Hybrid Gratings
Jingwen Li, Shengtong Wang and Xinghui Li

O-14-0062

Application of Phase Measurement Deflectometry Method in Transparent High-Reflection Materials
Dongxue Wang, Changshuai Fang, Lei Liu and Xiaodong Zhang

O-14-0064

Flexible Registration: A Higher-precision Point Cloud Registration Method Applied to Multiple Sensor Group
Changshuai Fang, Zhengwen Li and Xiaodong Zhang

O-14-0067

In-Situ Measurement of Curved Surfaces on Ultraprecision Machine Tools via Chromatic Confocal Probes
Momoka Watanabe, Neil Naples and Jiwang Yan

SessionOptical Machining & Measurement III
Date/TimeTuesday, December 3, 2024 / 17:00 – 18:00
RoomGallery 1,2&3
Session ChairsProf Shuming YANG and Dr Ryo SATO

O-14-0068

Investigation on Form-preserving Polishing of Optical Element/system Via An Active Fluid Jet
Zexiao Li, Hao Zhang, Peng Wang and Xiaodong Zhang

O-14-0084-A

Ultra-Smooth Combined Polishing Process for Nickel-Phosphorus Alloy Components
Mr Shaozhi ZHANG

O-11-0039

Transformer-based Denoising of Microlens Array Shearing Interferogram
Ruoxin Wang, Wenkai Zhao, Zhanchen Zhu, Bo Wang and Chi Fai Cheung