Proceedings of the
9th International Conference of Nanomanufacturing (nanoMan2024)
December 1 – 4, 2024, Singapore

High Precision Manufacturing of Small Aperture Double Aspheric Shaping Element

Shiyu Chen1,2,3, Yang Ou1,2,3,4, Cheng Huang1,2,3,4, Wenwen LU1,2,3 and Yupeng Xiong1,2,3,4,a

1College of Intelligent Science, National University of Defense Technology, Changsha, China
2Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha, China
3Hu'nan Key Laboratory of Ultra-precision Machining Technology, Changsha, China
4Nanhu Laser Laboratory, National University of Defense Technology, Changsha, China.

ABSTRACT

Small-aperture aspherical optical components that significantly enhance imaging quality and improve the optical performance of instruments when employed in optical systems, The manufacturing of small-aperture aspherical optics still faces issues related to processing efficiency and accuracy, due to the relatively limited processing space for such components. In order to produce high precision small aperture aspherical optical components, The ultrasonic vibration assisted cutting and the high precision grinding and polishing technology were used for the processing. The surface accuracy was less than 200nm measured with a profiler, and the roughness was smaller than 20nm with the help of the white light interferometer.

Keywords: Small aperture aspheric surface, Ultrasonic vibration assisted cutting, Beam shaping.


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