Proceedings of the
9th International Conference of Nanomanufacturing (nanoMan2024)
December 1 – 4, 2024, Singapore
Investigation on Form-preserving Polishing of Optical Element/system Via An Active Fluid Jet
1State Key Laboratory of Precision Measuring Technology & Instruments, Laboratory of MicroNano Manufacturing Technology, Tianjin University, Tianjin, China.
2Tianjin Jinhang Institute of Technical Physics, Tianjin, China
ABSTRACT
A wide variety of optics are required to be manufactured efficiently in high form accuracy together with an ultrasmooth texture. Single point diamond turning (SPDT) shows an advantage of high efficiency in form generation since it can produce optical surfaces with sub-micrometer form accuracy directly. However, the machining tool mark is a significant fact that leads to expected diffraction, which will seriously affect the optical performance. The inevitable residual turning marks affect the performance of the optical surface, which produces a diffraction effect and stray light. Motivated by this, an efficient post-treatment method of a diamond-turned surface with low cost, wide applicability, and superior form-preserving capability has been paid more attention. A series of spot polishing tests are carried out to study the effect of the AFJ polishing parameters on the material removal rate of the turning marks through orthogonal experiments and check the validity of the proposed model. Finally, the practicality of the AFJ polishing method is demonstrated on an optical elements and optical system. The experimental results and the theoretical analysis prove that AFJ polishing technology can lead to the post-treatment of diamond-turned surfaces in a form-preserving manner.
Keywords: Ultra-precision machining, Tool marks, form-preserving polishing, Active fluid jet polishing.
