Proceedings of the
9th International Conference of Nanomanufacturing (nanoMan2024)
December 1 – 4, 2024, Singapore
Study on Ultra-Precision Water Dissolution Polishing of KDP Crystals
State Key Laboratory of Precision Measuring Technology and Instruments, Center of Micro/Nano Manufacturing Technology (MNMT), Tianjin University, Tianjin, China.
ABSTRACT
Potassium dihydrogen phosphate (KDP) crystals have attracted much attention in the field of laser systems due to their excellent nonlinear optical properties, high laser damage threshold, and outstanding transparency and birefringence across the near-infrared to ultraviolet wavelength range. However, KDP crystals are soft, brittle, and easily soluble in water, making it difficult to obtain high-quality surfaces. In this study, a polishing solution composed of ethanol and water was utilized. Through a two-step abrasive-free water dissolution polishing technique, a high-quality KDP crystal surface with a surface roughness of 2.78 nm in Sa was obtained. The effectiveness of the cleaning method was experimentally verified, and the influence of ethanol content in the polishing solution on surface roughness and material removal rate was also investigated. This work provides theoretical basis and technical support for the ultra-precision machining of KDP crystals.
Keywords: KDP crystals, Water dissolution, Two-step polishing, Precision cleaning.
