Proceedings of the
9th International Conference of Nanomanufacturing (nanoMan2024)
December 1 – 4, 2024, Singapore
Frequency Domain Analysis of Surface Errors Based on Imaging Performance
State Key Laboratory of Precision Measurement Technology & Instruments, Laboratory of MicroNano Manufacturing Technology—MNMT, Tianjin University, China.
ABSTRACT
Surface errors introduced during the manufacturing process can be categorized into low, middle, and high spatial frequency regions of the power spectral density function. These regions have distinct effects on image quality, particularly on the diffraction-limited point spread function. Generally, low spatial frequency errors produce conventional aberrations, middle spatial frequency errors result in small-angle scatter and high spatial frequency errors cause wide-angle scatter. However, the cutoff frequencies separating these regions are not clearly defined and largely depend on design and manufacturing experience. This paper presents a surface error model for a Cooke triplet system that utilizes sinusoids to represent structural errors in ultra-precision diamond turning. Additionally, the relationships between cutoff frequencies and diffraction PSFs are systematically investigated, with particular emphasis on their correlation to the field of view, surface position, and working wavelength.
Keywords: Surface errors, Frequency category, Point spread function.
