Proceedings of the
9th International Conference of Nanomanufacturing (nanoMan2024)
December 1 – 4, 2024, Singapore
Impact of Polyurethane Elasticity on the Gap between Polishing Tool and Work Surface in Elastic Emission Machining Systems
State Key Laboratory of Precision Measuring Technology & Instruments, Laboratory of Micro/Nano Manufacturing Technology, Tianjin University, Tianjin, China.
ABSTRACT
Elastic emission machining (EEM) is an atomic-scale polishing method. It achieves atomic-scale material removal through the chemical adsorption of nanoparticles onto the workpiece surface, resulting in an ultra-smooth finish. As a non-contact processing method, the gap between the polishing tool and the workpiece surface significantly influences the machining effect. Since soft polyurethane materials are typically used for the polishing wheels, the elastic deformation of the material during machining affects the control of the polishing gap. In this study, an EEM setup is established, and the expansion of the polishing tool at different rotational speeds is calibrated using a laser displacement sensor. Additionally, a surface roughness evolution model is established. Through elastic emission machining of monocrystalline silicon, a surface roughness of 0.13 nm in Rq is achieved. This work provides technical support for the design and process optimization of EEM systems.
Keywords: Elastic emission machining, Polishing gap, Roughness evolution, ACSM.
