Multi-Material Micro Manufacture


ISBN: 978-981-07-3353-7 (Hardbound)
Pages: 342 pp
Year: 2012

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This volume is a compilation of 6 keynote lectures and 61 papers representing the scientific and technical advances in various aspects of advanced micro technologies with respect to a wide range of materials, and the development of new production platforms for micro systems-based products.

Themes addressed include:
Components: Fabrication & Assembly,
Process Modelling & Simulation,
Process Characterisation Including
Process Chains, Metrology: Inspection &
Characterisation, Novel Materials:
Characterisation & Processing, Systems:
Novel Product & Systems Design and

Readership: Engineers, scientists, professionals and academics in the field of nanotechnology and micro manufacture.

Additional information

Weight1 kg


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