This volume is a compilation of 6 keynote lectures and 61 papers representing the scientific and technical advances in various aspects of advanced micro technologies with respect to a wide range of materials, and the development of new production platforms for micro systems-based products.
Themes addressed include:
Components: Fabrication & Assembly,
Process Modelling & Simulation,
Process Characterisation Including
Process Chains, Metrology: Inspection &
Characterisation, Novel Materials:
Characterisation & Processing, Systems:
Novel Product & Systems Design and
Readership: Engineers, scientists, professionals and academics in the field of nanotechnology and micro manufacture.