Description
This volume is a compilation of papers representing the scientific and technical advances in various aspects of advanced micro technologies with respect to a wide range of materials, and the development of new production platforms for micro systems-based products.
The contributions from leading authors from universities, independent research and corporate organizations provide an invaluable overview of this rapidly moving subject and an insight into key research and development areas. This comprehensive collection of indexed and peer-reviewed articles is contained on a CD with search functionality.
Readership: Engineers, scientists, professionals and academics in the field of nanotechnology and micro manufacture.
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