Design of MEMS Dual-band Microstrip Antenna Array based on High Resistivity Silicon Substrate

Jinghui. Weia, Xiaoming. Liub and Zhonggan. Zhuc

School of Mechatronics Engineering of UESTC, University of Electronic Science and Technology of China, Chengdu, China.


A design of MEMS C/X dual-band microstrip antenna array based on high resistivity silicon substrate is introduced. Two bands share a rectangular patch, and a cavity is etched on high resistivity silicon substrate to reduce the equivalent dielectric constant, X-band mode is fed by a coplanar microstrip line, C-band mode is fed through a coupling slot from a microstrip line that runs underneath the patch. ADS is applied to design the impedance matching network for X band, and HFSS is applied to tune the imput impedance of C band. The result shows that the input impedance of C/X dual band antenna element is matched. Then, a C/X dual-band two-element antenna array is designed. The HFSS simulation indicates that: C-band array operates at 7.400GHz, with a return loss of -32.505dB, a gain of 8.198dB, a bandwidth of 170M, a radiation efficiency of 74.024%. X-band array operates at 10.010GHz, with a return loss of -37.460dB, a gain of 9.328dB, a bandwidth of 230M, a radiation efficiency of 74.429%. The two-element antenna array has a good dual-band radiation characteristics. Moreover, the fabrication process of the proposed microstrip antenna array is designed. In a word, the microstrip antenna array has the characteristics of dual-frequency, miniaturization, light-duty and integration, which satisfies the design requirements of the air light communication system.

Keywords: MEMS microstrip antenna, Array, High resistivity silicon substrate, Dual-band, Impedance matching.

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