doi:10.3850/978-981-08-7723-1_P078

ABSTRACT

A design of MEMS C/X dual-band microstrip antenna array based on high resistivity silicon substrate is introduced. Two bands share a rectangular patch, and a cavity is etched on high resistivity silicon substrate to reduce the equivalent dielectric constant, X-band mode is fed by a coplanar microstrip line, C-band mode is fed through a coupling slot from a microstrip line that runs underneath the patch. ADS is applied to design the impedance matching network for X band, and HFSS is applied to tune the imput impedance of C band. The result shows that the input impedance of C/X dual band antenna element is matched. Then, a C/X dual-band two-element antenna array is designed. The HFSS simulation indicates that: C-band array operates at 7.400GHz, with a return loss of -32.505dB, a gain of 8.198dB, a bandwidth of 170M, a radiation efficiency of 74.024%. X-band array operates at 10.010GHz, with a return loss of -37.460dB, a gain of 9.328dB, a bandwidth of 230M, a radiation efficiency of 74.429%. The two-element antenna array has a good dual-band radiation characteristics. Moreover, the fabrication process of the proposed microstrip antenna array is designed. In a word, the microstrip antenna array has the characteristics of dual-frequency, miniaturization, light-duty and integration, which satisfies the design requirements of the air light communication system.

Keywords: MEMS microstrip antenna, Array, High resistivity silicon substrate, Dual-band, Impedance matching.

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