| Solid-State Nanopore Array Membranes Patterned by Electron Beam Lithography, Nanosphere Lithography and Aluminum Anodization S.Wu, M. J. K. Klein, O. Vazquez-Mena, V. Auzelyte, V. Savu, N. Blondiaux, F. Montagne, H. Heinzelmann, R. Pugin and J. Brugger |