Contactless Methods for Characterization of Mechanical Properties of Nanomembranes: An Overview of Methods

doi:10.3850/978-981-07-0319-6_254

Contactless Methods for Characterization of Mechanical Properties of Nanomembranes: An Overview of Methods

J. Matovic¹, F. Kepllinger¹, S. A. Wilson² and Z. Jaksic³

¹Institute of Sensor and Actuator Systems, TU Wien, Vienna, Austria

²Microsystems and Nanotechnology Group, Materials Department, Cranfield University, Cranfield, UK

³Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Belgrade, Serbia

ABSTRACT

The paper presents a brief review of prevalent contactless methods for testing of the mechanical properties of ultrathin, free-standing membranes or nanomembranes. The thickness of the nanomembranes is in the range of 1 – 100 nm; however their aspect ratio may be well over 1.000.000. A majority of the methods for contact characterization of materials, including (nano) indentation, tensile tests and like are not applicable since they would damage or destroy the delicate structure of the nanomembrane. Therefore only indirect, contactless methods for material characterization are applicable.

Keywords: Nanomembranes, Membranes, Young’s modulus.

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Contactless Methods for Characterization of Mechanical Properties of Nanomembranes: An Overview of Methods

J. Matovic1, F. Kepllinger1, S. A. Wilson2 and Z. Jaksic3

1Institute of Sensor and Actuator Systems, TU Wien, Vienna, Austria

2Microsystems and Nanotechnology Group, Materials Department, Cranfield University, Cranfield, UK

3Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Belgrade, Serbia

ABSTRACT

J. Matovic¹, F. Kepllinger¹, S. A. Wilson² and Z. Jaksic³

¹Institute of Sensor and Actuator Systems, TU Wien, Vienna, Austria

²Microsystems and Nanotechnology Group, Materials Department, Cranfield University, Cranfield, UK

³Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Belgrade, Serbia