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doi:10.3850/978-981-07-0319-6_K005
An Open Foundry Concept for Microsystem Small Series Production: Concept and Examples
J. N. Burghartz1, C. Harendt1, H. Kueck2, W. Eberhardt2, H. Glosch3 and H. Reinecke3
1Institute for Microelectronics Stuttgart (IMS CHIPS), Allmandring 30a, 70569 Stuttgart, Germany
2Institute for Micro Assembly Technology (HSG IMAT), Allmandring 9b, 70569 Stuttgart, Germany
3Inst. for Microsystem Techn. (HSG IMIT), Wilhelm-Schickard-Str. 10, 78052 Villingen-Schwenningen, Germany
ABSTRACT
The microsystem industry and market are diverse and are driven by small and medium size enterprises (SMEs), which call for a suitable technology foundry service. In the context of the German Excellence Cluster microTEC southwest three non-for-profit research and development institutes funded by the State of Baden-Wuerttemberg have joined forces to connect their technology infrastructures and processes to provide such a foundry service under the name PRONTO. The aim is to create an open platform for small series production of complex microsystems, which allows for connecting specific process technologies located at a particular SME to the PRONTO infrastructure. Measures are in place to eventually migrate to a large volume production facility at the SME after a successful market entry of a given product or product family. Keywords: Microsystems, Foundry, Production platform, Small series production, Large volume production.
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