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doi:10.3850/978-981-07-0319-6_247
Optical Coherence Tomography – A Potential Tool for Roughness Assessment of Free and Embedded Surfaces of Laser-Machined Alumina Ceramic
R. Su1, M. Kirillin2, D. Jurków3, K. Malecha3, L. Golonka3 and L. Mattsson1
1Department of Production Engineering, KTH, the Royal Institute of Technology, Stockholm, 10044, Sweden
2Laboratory of Biophotonics, Institute of Applied Physics RAS, Nizhny Novgorod, 603950, Russia
3Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, Wrocław, 50-372, Poland
ABSTRACT
For an emerging market a mass and cost-effective production of non-silicon micro devices requires an in process and accurate 3D monitoring to assure the quality. Optical coherence tomography (OCT) providing high resolution contactless imaging is used to inspect the surface quality of a laser-machined alumina ceramic layer. Quantitatively the root mean square (rms) roughness is measured by traditional means and provides input parameters to the Monte Carlo simulation of OCT method. We found that the quality of both free and embedded surfaces of the highly-scattering alumina ceramic material can be evaluated by OCT. Keywords: Alumina ceramics, Optical Coherence Tomography (OCT), Light scattering, Surface roughness, Monte carlo method, Laser machining.
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