doi:10.3850/978-981-07-0319-6_219


Manufacturing of Functional Micro-and Nano-Structured Plastic Components and Silicon Devices


N. Blondiaux1, I. Zhurminsky1, M. J. K. Klein1,2, F. Montagne 1, G. Franc1, H. Heinzelmann1,
J. Brugger2 and R. Pugin1

1Swiss Center for Eletronics and Microtechnology (CSEM SA), Nanotechnology and Life Sciences Division Jaquet-Droz 1, Case Postale, CH-2002, Neuchâtel, Switzerland

2Ecole Polytechnique Fédérale de Lausanne (EPFL), STI IMT LMIS1, Lausanne, Switzerland

ABSTRACT

We report on the development of two cost efficient hybrid manufacturing chains for the fabrication of micro- and nano-structured plastic components and silicon devices.

In the approach proposed, self-assembly based structuring techniques and interference lithography have been developed for the low cost fabrication of micro-and nano-structured masters. These were used for replication into thermoplastics by hot-embossing and injection molding thus allowing the mass production of micro-nano-structured plastic components for biotech application.

In addition, nanosphere and block copolymer lithography have been successfully combined with standard microfabrication processes for the wafer-scale production of suspended ultrathin silicon nitride membranes with tunable pore diameter from 80 to 500 nm for applications in ultrafiltration and molecule separation.

Keywords: Micro-nanostructures, Self assembly, Interference lithography, Micro-nanomanufacturing, Nanofabrication, Nanoporous membranes.

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