doi:10.3850/978-981-07-0319-6_215

ABSTRACT

A novel process chain for master tool fabrication for the replication of micro and nano features is presented in this paper. The proposed process flow relies on using complementary direct write and replication technologies for micro- and nano-structuring over relatively large areas. Results are presented when the process chain is implemented for the production of 5”x5” Ni shims of 2.5D topography of different test structures incorporating different feature sizes.

Keywords: Process chain, FIB, Tool manufacture, UV-NIL, Electroforming, Ni-shim.

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