doi:10.3850/978-981-07-0319-6_201

ABSTRACT

Electronic micro devices are often based on structured ceramic platforms. One way of making these platforms is to use ceramic “thin tapes”, usually made by tape casting, individually structured, treated and assembled by stacking and lamination, and then sintered before the mounting of the active electronic components. In this way complex structures like integrated channels can be made. However the assembling of a large number of tapes is a complicated process that can be avoided by using “thick tapes” made by a rolling technique. Channels and deep structures can be made in a single thick tape, allowing for a simpler and more accurate structure for the use in several applications: lab-on-chip, heat sinks for LEDs, or functional devices for domestic applications. The EU-project Multilayer is developing a high volume sheet fabrication process. The materials being used are: alumina, silica, zirconia, and LTCC. This paper reports results from the thick sheet development within Multilayer. Samples have been made and structured and their behaviour has been investigated.

Keywords: Thick tapes, Rolling, Sheet materials, Alumina, Silica, Zirconia, LTCC, Multilayer.

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