Multi-Material Micro Manufacture

Description

This volume is a compilation of 6 keynote lectures and 61 papers representing the scientific and technical advances in various aspects of advanced micro technologies with respect to a wide range of materials, and the development of new production platforms for micro systems-based products. Themes addressed include: Components: Fabrication & Assembly, Process Modelling & Simulation, Process Characterisation Including Process Chains, Metrology: Inspection & Characterisation, Novel Materials: Characterisation & Processing, Systems: Novel Product & Systems Design and MultiLayer. Readership: Engineers, scientists, professionals and academics in the field of nanotechnology and micro manufacture.