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doi:10.3850/978-981-08-7615-9_BS05
Robust pH Sensing Characteristics of Rinos Structure With Sm2O3 Sensing Membrane and Rapid Thermal Annealing for Biosensor Application
Jer-Chyi Wang1,2, Chao-Sung Lai1, Chyuan-Haur Kao1, Hui-Yu Shih1 and Tseng-Fu Lu1
1Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan
2Biosensor Group, Biomedical Engineering Research Center, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan 333, Taiwan
ABSTRACT
This investigation proposes a novel Sm2O3/Si3N4/SiO2/Si RINOS device with an ONO (oxide- nitride-oxide) structure and Sm2O3 as the sensing membrane. To improve the sensing properties, the Sm2O3 was treated by RTA. Post deposition annealing (PDA) at 700°C increased the pH sensitivity of a 4nm-thick Sm2O3 sensing membrane from 41.69 to 55.44 mV/pH and improved the hysteresis and drift characteristics. Stress at –17V for 10 s, further enhanced the pH sensitivity to 70.13 mV/pH, which was higher than the Nernstian value. Moreover, this device can be operated by applying program/erase (P/E) stress to increase/reduce the pH sensitivity stable for over 100 P/E cyclings. The novel RINOS structure with Sm2O3 sensing membrane and RTAis a promising candidate for sensing ultra small signals in the human body micro-fluid applications.
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