Ceramics Processing in Microtechnology

Development of Polymer-high-k-ceramic-functional Composites for Applications as Embedded Capacitors
T. Hanemann and B. Schumacher

Sintered Reaction Bonded Silicon Nitride for Micro Mechanical Components
J. Rögner, M. Müller, K. -H. Lang and V. Schulze

Application of Design Patterns for the Development of Primary Shaped Microsystems: A Case Study
A. Albers, P. Börsting and T. Turki

Influence of Load and Surface Condition on the Tribological Performance of Zirconia for Applications in High-performance Microsystems
J. Schneider, T. Polzer and K. -H. Zum Gahr

Micro-EDM Machining Behaviour of ZrO 2 -TiN Ceramic Composites
E.Ferraris, M.Galbiati, F.Modica and D. Reynaerts