ABSTRACT
Ultraprecision diamond machining processes require dimensional accuracy in the sub micrometer range. Besides the use of ultraprecision machine tools and diamond machining processes, the clamping and alignment of work pieces within the machine tool coordinate system is an essential step to accuracy. In most diamond milling and diamond shaping processes, the work piece does not have to be aligned to one specific point on the machine tool. It is rather the exact knowledge of the true work piece position which is essential to machine structures with sub micron precision. The so-called referencing procedure defines the relative position between the diamond tool and the surface of the work piece. Today, this referencing procedure is still done manually, either by machining and analyzing test samples or by aligning the tool via scratch marks on the work piece surface.
The automation of the referencing procedure is promising to increase the efficiency of ultraprecision machining processes in terms of time and accuracy. In this paper, an automated referencing and alignment procedure is described, which enables the nano structuring of work pieces by means of diamond machining with an accuracy below ± 0.25 µm
Keywords: Ultraprecision, Nano fabrication, Precision alignmen.
