doi:10.3850/978-981-08-6555-9_188

ABSTRACT

This study aims to preview Virtual Prototyping approach application for MEMS mechanical characteristics determination, based on a sample of uniaxial capacitive accelerometer. Main activities are oriented to present force-deflection characteristic definition as well as impact performance under critical loads. Application of virtual techniques allows design verification in very early stage, especially in direction of mechanical characterization. This approach reduces time-to-market and decreases product development cost. Described case study is part of industrialized product and certain design modifications were performed using VP techniques.

Keywords: Accelerometer, Mechanical, Virtual prototyping, FEA, MEMS.

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