Micro-structure Machining by Ultra-fast Laser on Titanium Thin Film

doi:10.3850/978-981-08-6555-9_152

Micro-structure Machining by Ultra-fast Laser on Titanium Thin Film

Yu-Ting Lyu, Chao-Yung Yeh, Fu-Chuan Hsu, Chung-Li Tsai and Antony H. C. Lee

Micro/Meso Mechanical Manufacturing R&D Department, Metal Industries Research & Development Centre(MIRDC), Kaohsiung, Taiwan

ABSTRACT

A machining process of micro-structures on titanium thin films was developed using an ultra-fast laser system. The quality processing finish-up for smooth surface without edge burrs, especially for the manufacturing of medical parts with micro-structures, has been extensively studied in recent years. Based on the unique machining phenomena and well-defined parameters, square-shaped hole-structures in size of 50 µm were made on 50 µm titanium thin film with high quality and only little heat-affected-zone (HAZ). The mode-locked ultra-fast laser used is capable of generating 10ps pulse duration, repetition rate (R.R.) 50~100 kHz and pulse energy 100~200 µJ. The laser machining process parameters are modified with the machining qualities monitored, in particular, the surface profiles are examined by optical microscope (OM) and scanning electron microscope (SEM) instruments. Square-shaped holes with fine quality were in 50×50µm². The titanium mesh for new-type medical stent with net-structure was achieved successfully on a 50×10mm² titanium film.

Keywords: Ultra-fast laser, Titanium mesh, Micro machining.

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