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doi:10.3850/978-981-08-6555-9_150
Capability Maturity Study of the Horizontal and Vertical Integration of Structuring, Patterning and Characterization MNTs
R. Minev1, P. Vella1,2, E. Brousseau1, S. Dimov1, S. Scholz1 and C. Matthews1
1MEC, Cardiff Univertsity, CF24 3AA, UK
2DIME, University of Malta, Malta
ABSTRACT
A maturity evaluation of single MNT (micro/nano technological) processes was followed by a maturity evaluation of process pairs and chains, by cross-linking their capability parameters, compatibility and complementarity metaparameters in this study. The evaluation methodology was based on Watts and Crosby Capability Maturity Model (CMM) and targeted the Documentation, Dynamics of changes, Capabilities and Consistency aspects of some master making installations that represent alternative or complementary manufacturing routes within the EUMINAfab consortium
Keywords: Process pairs, Process chains, Capability maturity modelling, MNT.
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