doi:10.3850/978-981-08-6555-9_125

ABSTRACT

Microstructuring finds many applications in various fields, such as a means to increase the efficiencies of solar cells by increasing the haze, to make self-cleaning hydrophobic surfaces, to create new mechanical properties etc. This work shows the large potential for structuring surfaces with a prototype, the Linear Coating Device, combined with post-treatments involving various techniques (plasma etching, catalytic etching, plasma deposition, and laser ablation). The Linear Coating Device is a process that enables to deposit monolayers of micro- and nanoparticles and is similar to the Langmuir-Blodgett technique, but it has a higher potential for industrial applications since it enables to coat large surface areas, can be applied to a wide range of materials, enables to deposit on flexible or rigid substrates and is a fast on-line process [1]. In this work, silicon and glass substrates and a wide range of etching/deposition techniques have been studied and many applications can be found for these structured surfaces.

Keywords: Microstructuring, Linear coating device, Etching.

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