Proceedings of the
World Congress on Micro and Nano Manufacturing (WCMNM 2022 )
19–22 September 2022, Lueven, Belgium
doi:10.3850/978-981-18-5180-3_RP21-0071
Micro-Electrical Discharge Machining µEDM : Effect of the Electrical Parameters on the Geometrical Performance of the Machining
Univ Lyon, Université Claude Bernard Lyon 1, CNRS, INSA Lyon, Ecole Centrale de Lyon, CPE Lyon, INL, UMR5270, 69622 Villeurbanne, France
ABSTRACT
Micro-Electrical Discharge Machining (µEDM), also known as µEDM milling, is a non-contact machining technique for conductor or semiconductor materials. It is mainly suitable for machining hard materials. The principle consists of creating electric, eroding discharges between the micro-tool and the workpiece, both of which are immersed in a dielectric. It is a complementary process to the mechanical or laser micromachining techniques, or to techniques from microelectronics (Reactive Ion Etching RIE, Deep Reactive Reactive Etching DRIE, LIGA). The objective of this paper is to study the effect of electrical parameters (applied voltage VEE , working capacity Cc) for several diameters of the micro-tool on the geometrical machining performance (removed volume, lateral gap, crater depth and crater shape). The optimal parameters will be used, thereafter, at the time of the machining of complex form (drilling of holes, channels, ...).
Keywords: Micro-Electrical Discharge Machining µEDM, Crater, Gap, Removed Volume.
Univ Lyon, Université Claude Bernard Lyon 1, CNRS, INSA Lyon, Ecole Centrale de Lyon, CPE Lyon, INL, UMR5270, 69622 Villeurbanne, France
ABSTRACT
Micro-Electrical Discharge Machining (µEDM), also known as µEDM milling, is a non-contact machining technique for conductor or semiconductor materials. It is mainly suitable for machining hard materials. The principle consists of creating electric, eroding discharges between the micro-tool and the workpiece, both of which are immersed in a dielectric. It is a complementary process to the mechanical or laser micromachining techniques, or to techniques from microelectronics (Reactive Ion Etching RIE, Deep Reactive Reactive Etching DRIE, LIGA). The objective of this paper is to study the effect of electrical parameters (applied voltage VEE , working capacity Cc) for several diameters of the micro-tool on the geometrical machining performance (removed volume, lateral gap, crater depth and crater shape). The optimal parameters will be used, thereafter, at the time of the machining of complex form (drilling of holes, channels, ...).
Keywords: Micro-Electrical Discharge Machining µEDM, Crater, Gap, Removed Volume.
