Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

Study on Machining Errors Analysis of Optical Surface/System by Performance Constraint

Xianlei Liu, Fengzhou Fang and Xiaodong Zhanga

State Key Laboratory of Precision Measuring Technology and Instruments, Laboratory of MicroNano Manufacturing Technology, Tianjin University, Tianjin 300072, China.


Optical performance is the final evaluation specification for the applications of optical surfaces/systam. However, the traditional evaluation criteria in manufacturing have been the form error and surface roughness, which are compensated to control optical performance indirectly. There are different error distributions, not just the symmetry error, for the freeform surfaces. Previous studies have found that optical performance can differ significantly despite a similar value of form error due to different underlying error distributions. This paper, therefore, proposes a novel approach to directly achieve compensation of optical performance. The mapping model between machining errors and wavefront aberration was established by multi-body system (MBS) theory and optical ray tracing. Simulations were conducted based on the mapping model. The effect of machining errors on the wavefront aberration was obtained, and the main machining error was identified. This study provides an innovative assistance to directly improve the optical performance and machining accuracy of optical mirrors.

Keywords: optical performance, Machining error, Form error, Compensation

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