Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

Coherent Extreme Ultraviolet Source using a Single Dielectric Nanostructure

Seunghwoi Han1,a

1(Arial Narrow 7.5pt) 1 School of Mechanical Engineering, Chonnam National University, 77 Yongbong-ro, Buk-gu, Gwangju, 61186, Republic of Korea


High-harmonic generation (HHG) using crystalline solids is a novel method to generate coherent extreme-ultraviolet pulse. Metal based nanostructure using plasmonic field enhancement can improve the efficiency of HHG. However, the metal based nanostructures used for plasmonic HHG have a limitation on low damage threshold of metal. This study demonstrates an all-dielectric conical sapphire nanostructure used as a compact HHG emitter that generates high order harmonics with wavelengths up to approximately 60 nm without severe damage. We compare the structure with a gold layered conical sapphire nanostructure. The conical sapphire structure has a higher damage threshold and reusability for EUV generation even though it has a lower HHG intensity than the gold layered conical sapphire structure because of the lower intensity enhancement. The results confirm the possibility of a compact EUV light source for nanoscale applications.

Keywords: nanostructure, extreme ultraviolet, femtosecond pulse, high harmonic generation

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