Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore
doi:10.3850/978-981-18-6021-8_OR-14-0040

Feasibility study on laser fusion cutting of ultra-thin glass (UTG) aimed for defect-free, molten edge formation

Sho Itoh1,a, Naoto Nagano1, Shun Obuchi1, Souta Matsusaka1 and Hirofumi Hidai1,2

1Department of Mechanical Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba-shi, Chiba, 263-8522, Japan

2Molecular Chirality Research Center, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba-shi, Chiba, 263-8522, Japan

ABSTRACT

Ultra-thin glass (UTG) with a thickness of less than 200 µm is a promising material because UTG haves excellent lightweightness and flexibility, originated from its thinness, as well as typical glass characteristics. Thus, a variety of new applications has been proposed and developed. One of the challenges of UTG application, which is also caused by its thinness, is the difficulty of processing, including cutting, drilling, and other micromachinings after UTG is formed. For example, defects are created around the edge during a typical cutting process and will drastically reduce the edge strength. Therefore, an alternative cutting process is still required to promote UTG to be utilized for manufacturing. The authors identify the technical gap here and focus on the potential of laser fusion cutting, which induces molten edges where a higher edge strength is expected. In this study, the experimental setup of laser fusion cutting is designed specifically to cut UTG. Then, the key parameters, such as laser powers, scanning speeds, and assist air angles, are identified, and the influence on the edge shape is elucidated. Finally, the method to reduce the thermal stress caused by laser irradiation is proposed and demonstrated together with the quantitatively estimated thermal stresses.

Keywords: Laser fusion cutting, Ultra-thin glass, Bending strength



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