Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

Study on the Spinnable Carbon Nanotube Arrays Prepared by Chemical Vapor Deposition

Qi-Fan Liu, Cheng-I Chang, Ruei-Chi Hsu, and Hung-Yin Tsaia

Department of Power Mechanical Engineering, National Tsing Hua University, No. 101, Sec. 2, Guangfu Rd., East Dist., Hsinchu City, 300044, Taiwan (R.O.C.)


The purpose of this research was to establish spinnable carbon nanotube(CNT) arrays. A carbon nanotube array with a certain height and good alignment was grown by chemical vapor deposition, it was applied to use dry spinning method to prepare CNTs fiber. In this study, CNT arrays were grown by two different processes, thermal chemical vapor deposition and floating catalyst chemical vapor deposition. Electron beam evaporation technology was used to deposit the iron layer and ferrocene powder as the catalyst. By controlling the gas volume flow, reaction temperature and other parameters in the process to control the growth of CNTs. The research results show that CNTs grown by floating catalyst chemical vapor deposition can get better results. By changing the evaporation temperature of ferrocene powder, CNT array of better quality can be grown. When the ferrocene vaporization temperature was 360 °C, the C2H2 flow rate was 15 sccm, the H2 flow rate was 60 sccm, the H2 pre-treatment time was 4 min, and the reaction temperature was 770 °C for 15 min, the height of CNT arrays can reach 568 µm.

Keywords: Spinnable CNT array, Chemical vapor deposition, Ferrocene evaporation temperature, Taguchi method, Variance analysis

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