Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

Development of a Novel Vibration-Assisted Ultraprecision Cutting System for Fabricating Hierarchical Micro/Nanostructures

Hanheng Du1, Zhiwei Zhu2 and Suet To1,a

1State Key Laboratory of Ultra-precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong, China

2School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China


Micro/nanostructures can afford unique functions in the electrical, optical, mechanical, and thermal properties, which have attracted more and more interest in recent years. The common machining methods, such as photolithography and laser ablation, face the drawbacks of high machining cost and low machining quality. To solve these problems, a novel vibration-assisted ultraprecision cutting system is proposed to fabricate the micro/nanostructures in this study. Firstly, a mechanical structure of this cutting system was designed. Then, a finite element model was established to evaluate the working performance of the developed cutting system. Next, a test platform of the working performance was built to identify the bandwidth of the developed cutting system. Finally, a preliminary machining experiment was performed. The hierarchical micro/nanostructures with the high aspect ratio were successfully machined on workpiece surfaces, demonstrating the effectiveness of the developed cutting system. This study provides a highly efficient cutting system, which can be directly applied in the machining industries.

Keywords: Ultraprecision cutting system, Vibration-assisted machining, Bandwidth, Micro/nanostructures

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