Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

Research on Terahertz Detector Based on Graphene Nanoribbon and Micron Ribbon

Shengmei He1,2, Shuming Yang1,2,a, Ze Zhang1,2, Peirui Ji1,2 and Wei Chengyi1,2

1State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi an Jiaotong University, Xi an 710049, China.

2School of Mechanical Engineering, Xi an Jiaotong University, Xi an 710049, China.


Terahertz detection technology has great significance in security detection, radar detection, data communication, biomedicine and astronomical observation. With the rapid development of technology in various fields, higher requirements are put forward for terahertz detectors. In order to solve the problems of low temperature, low sensitivity and complex structure of terahertz direct detectors, the research of terahertz direct detectors based on graphene nanoribbons and micro ribbons is carried out in this paper. Graphene is prepared into a strip array structure and the energy gap is adjusted to excite the SPPs of graphene for terahertz direct detection. Firstly, the excitation and regulation of terahertz plasmons are studied. Secondly, the terahertz detector device model based on graphene strip array is designed, and the influence of various structural parameters of the device on the resonant frequency of the device is simulated and analyzed using the FDTD, which provides effective structural parameters for the device preparation. The simulation results show that graphene ribbons can effectively improve the absorption of terahertz wave, and the optical response to different frequency points can be achieved by designing the width and period of graphene ribbons and Fermi energy levels. Finally, the fabrication process of terahertz detector based on graphene nanoribbon and micron ribbon is designed, and the structure models of the detector is completed.The electrical characteristics of the device are tested, and the regulation effect of gate voltage on device response is verified, which provides a basis for further research on THz detector.

Keywords: Terahertz detection, Terahertz plasmon, FDTD, Graphene nanoribbon , Graphene micron ribbon

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