Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

Fabrication of Flexible Coil on PDMS for MEMS-based Electromagnetic Membrane Actuator

Chao Qi1, Atsushi Nakazato2, Naohiro Sugita3 and Tadahiko Shinshi3,a

1Department of Mechanical Engineering, Tokyo Institute of Technology, R2-38, 4259 Nagatsuta-cho, Midori-ku, Yokohama, 226-8503, Japan

2Corporate R&D Division, Toyo Ink SC Holdings Co., Ltd, 1-5-7, Takatsukadai, Nishi-ku, Kobe, 651-2271, Japan

3Institute of Innovative Research, Tokyo Institute of Technology, R2-38, 4259 Nagatsuta-cho, Midori-ku, Yokohama, 226-8503, Japan


MEMS-based electromagnetic membrane actuators (EMMAs) play a significant role in driving micropumps due to their high response, environmental insensitivity, and low driving voltage. However, the development of conventional moving-magnet EMMA, consisting of a membrane/magnet structure and a planar coil, is limited by the time-consuming and costly fabrication process because of the indirect integration of high-temperature-deposited film-magnet and the polydimethylsiloxane (PDMS) polymer membrane. We propose a moving-coil EMMA consisting of a coil/membrane structure. The integration is simplified by screen-printing Ag-based conductive polymer composite (CPC) material having high elongation directly on the PDMS membrane as the coil. The magnet can be directly deposited on the heat-resist wafer, such as silicon or glass. This paper focuses on the feasibility verification of printing coil on PDMS membrane. The CPC is densely printed and has a solid shape for the printed pattern on the PDMS treated by oxygen plasma. The minimum line, average thickness, and resistivity of the printed CPC on treated PDMS are 100 µm, 6 µm, and 2×10-6 Ω.m, respectively. The tensile test shows that the printed CPC is still electrically conductive under a strain of 40%.

Keywords: MEMS, Electromagnetic membrane actuator, Flexible coil, Screen printing, PDMS

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