Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore
doi:10.3850/978-981-18-6021-8_OR-12-0088
Surface Micromachining by Micro Slurry-Jet and Masking Process
1Graduate school of Science and Technology, Kumamoto University, 2-39-1, Kurokami, Chuo-ku, Kumamoto 860-8555, Japan
2Faculty of Advanced Science and Technology, Kumamoto University, 2-39-1, Kurokami, Chuo-ku, Kumamoto 860-8555, Japan
ABSTRACT
We investigated methods for the direct fabrication of bio-surface-inspired microstructural patterns on a variety of material surfaces. As a mechanical removal process, a wet-blast-like Micro slurry-jet method with alumina particles was employed to be applicable to a wide range of materials. A masking system was adopted for the entire process to improve the machining accuracy in the horizontal direction. Micro-machining is carried out by masking the material surface at the micro level and mechanically removing only the exposed parts of the material surface. A surface micromachining system equipped with the above system has been developed. Dot and line patterns were created as different micro-patterns on soda-lime glass. It was shown that the proposed microfabrication method is capable of microfabricating various patterns on brittle materials such as glass, without loss of transparency.
Keywords: Bio-inspired surface, micromachining, Surface texturing, Mechanical removal process, Masking process
1Graduate school of Science and Technology, Kumamoto University, 2-39-1, Kurokami, Chuo-ku, Kumamoto 860-8555, Japan
2Faculty of Advanced Science and Technology, Kumamoto University, 2-39-1, Kurokami, Chuo-ku, Kumamoto 860-8555, Japan
ABSTRACT
We investigated methods for the direct fabrication of bio-surface-inspired microstructural patterns on a variety of material surfaces. As a mechanical removal process, a wet-blast-like Micro slurry-jet method with alumina particles was employed to be applicable to a wide range of materials. A masking system was adopted for the entire process to improve the machining accuracy in the horizontal direction. Micro-machining is carried out by masking the material surface at the micro level and mechanically removing only the exposed parts of the material surface. A surface micromachining system equipped with the above system has been developed. Dot and line patterns were created as different micro-patterns on soda-lime glass. It was shown that the proposed microfabrication method is capable of microfabricating various patterns on brittle materials such as glass, without loss of transparency.
Keywords: Bio-inspired surface, micromachining, Surface texturing, Mechanical removal process, Masking process
