Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

A Large-Scale Nanomachining System Established Based on AFM Contact Mode

Jiqiang Wang1,, Yanquan Geng1, Junshuai Jia1 and Yongda Yan1,a

1Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, P.R. China


As a new nanomachining technology, atomic force microscope (AFM) tip-based nanomachining technique has the merits of easy processing, low equipment cost, low requirement on the machining environment as well as nanometric machining precision. Moreover, nanostructures with a constant depth can be machined on inclined surfaces, curved surfaces and even complex surfaces with the aid of the constant force machining characteristics. However, most of the present AFM tip-based nanomachining process are carried out on a commercial AFM system, which is limited by the small working range and normal force. To overcome these limitations, a homemade micro/nano machining device is developed in this study based on the contact mode of the AFM system. The maximum machining range and normal load are increased to 50 mm and 100 µN, respectively. The large-scale machining process is achieved based on two high-precision stages driven by air floatation. To realize the motion control of the platform, real-time acquisition of signals and the setting of PID controller parameters, the hardware and software system of the device are developed. The stability of the PSD signal under open-loop situation is measured to eliminate the factors that affects the system stability as far as possible. The steady and dynamic performance of the control system are evaluated by measuring the output response curve of the control system under step input. The output responses of the control system under triangular wave and sinusoidal wave signals with different frequencies are observed to verify the feasibility of variable force control machining. The machining subroutines are established to achieve the self-defined trajectory machining and variable force control machining. Nanoripple structures with controllable period are fabricated based on the variable force control method. Furthermore, the influence of processing parameters on the machining outcomes is analyzed. A large-scale micro/nano structure machining experiment is carried out and the machining quality of the obtained structures is evaluated.

Keywords: Large-scale nanomachining, Contact mode, Variable force control machining

PDF Download