Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

Study on High Performance Machining Optical Surface and its Post-Treatment Strategy by Active Fluid Jet Polishing

Zexiao Li, Hao Zhang, Xiaodong Zhanga and Fengzhou Fang

1State Key Laboratory of Precision Measuring Technology & Instruments, Laboratory of MicroNano Manufacturing Technology, Tianjin University, Tianjin 300072, China


Single point diamond turning (SPDT) shows an advantage of high efficiency in form generation since it can produce optical surfaces with sub-micrometer form accuracy directly. However, the machining tool mark is a significant fact that leads to expected diffraction, which will seriously affect the optical performance. Motivated by this, the relationship between optical performance and tool marks distribution is studied to guide for the high-performance machining and an active fluid jet (AFJ) polishing technology for removing diamond turning marks is introduced and investigated. A simulation model of turning marks removal in the AFJ polishing is developed. A series of spot polishing tests are carried out to study the effect of the AFJ polishing parameters on the material removal rate. A spiral polishing test is conducted and the result shows that a preferred value of material removal which is suitable for eliminating the turning marks without destroying the surface form can be determined by the changes of surface profiles and microtopography. Finally, the practicality of the AFJ polishing method is demonstrated on an aluminum surface. The experimental results and the theoretical analysis prove that AFJ polishing technology can lead to the post-treatment of diamond-turned surfaces in a form-preserving manner.

Keywords: Ultra-precision machining, High performance, Tool marks, Active fluid jet polishing

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