Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

High-Resolution 3D Imaging by Structured Illumination Microscopy

Jong-Kyu Park1, and Ki-Nam Joo1,a

1Dept. of Photonic Engineering, Chosun University, 309 Pilmun-daero, Dong-gu, Gwangju, 61452, South Korea


In this investigation, we describe the combined approach with SR-SIM and OS-SIM to obtain high-resolution 3D images of the industrial specimens. By using digital micromirror device (DMD), the spatial sinusoidal pattern is rotated and phase-shifted, imaged on a specimen and a CCD cameara. By adopting 2D Fourier transformation, each high-resolution image at the specific axial position is calculated, and the 3D imaging was reconstructed by the aid of the OS-SIM. We believe this combined approch of SIM can be successfully applied in semiconductor and display industries.

Keywords: High resolution, Structured illumination microscopy, 3D imaging

PDF Download