Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

A Cylindricity Measurement with Nanometric Uncertainty

Saint-Clair Toguem Tagne1,2,a, Alain Vissière1, Mohamed Damak3,5, Charyar Mehdi-Souzani4, Nabil Anwer2 and Hichem Nouira1,b

1Laboratoire Commun de Métrologie, Laboratoire National de Métrologie et ďEssais (LNE-CNAM), 1 Rue Gaston Boissier, 75015, Paris, France

2Université Paris-Saclay, ENS Paris-Saclay, LURPA, 91190, Gif-sur-Yvette, France

3GEOMNIA: 19B rue des Châteaux, 59290, Wasquehal, France

4Université Paris-Saclay, Université Sorbonne Paris Nord, ENS Paris-Saclay, LURPA, 91190, Gif-sur-Yvette, France

5Arts et Métiers Institue of Technology, LISPEN, 8, Bd Louis XIV, 59046, Lille Cedex, France


Cylindricity is a geometric specification that describes the three-dimensional shape of a cylindrical element. Its control using commercial machines raises a number of practical issues that limit current measurement capabilities. At the moment, there is no documented measuring instrument capable of generating a three-dimensional mapping of the cylindricity deviations with a nanometric uncertainty. The French National Metrology Institute (LNE) has recently developed an ultra-high accuracy cylindricity measuring machine named NanoCyl. As a primary standard, the NanoCyl aims to improve the current cylindricity measurement capabilities. In this paper, a brief description of the NanoCyl is provided. Based on a discussion on the conventional cylindricity measurement strategies, a new protocol for cylindricity measurement is developed. Its application relies on the architecture of the NanoCyl machine as well as the use of a reference cylindrical form. The developed protocol's specificity consists of a separate identification of the three components of the cylindricity deviations (cross-section deviations, radial deviations and median line deviations). The measurement protocol has been experimentally investigated using a cylindrical artefact of 300 mm diameter. Error separation techniques (ESTs) were applied for the elimination of machine axis errors. An error budget analysis led to a best estimate of the measurement uncertainty. The obtained results showed an achievable standard deviation of 32.8 nm.

Keywords: High accuracy measurements, Dimensional metrology, Cylindricity, Error separation techniques

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