Proceedings of the
9th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2022)
15 – 18 November 2022, Singapore

Development of ultra-small fast steering mirror for spectroscopic sensor with high speed and excellent disturbance rejection characteristics

Chan-Hee Lee1, Jun-Ho Chang1, Dong-Chan Lee1, Hyo-Wook Bae2, Do-Hyun Park2 and Ho-Sang Kim1,a

1Institute for Advanced Engineering, 175-28, Goan-ri 51 beon-gil, Yongin-si, Gyeonggi-do, 17180, South Korea

2MOORI Technologies, 909, 42 Changeop-ro, Sujeong-gu, Seongnam-si, Gyeonggi-do, 13449, South Korea


Fast steering mirror has been applied in the field of optics and chemical analysis because it can compensate the tilting error when the moving mirror assembly moves for optical translation in spectroscopic sensors. The important factors in removing the tilting error quickly and effectively in Michelson type interferometer are how to design, manufacture and develop the fast steering mirror. It is also essential to verify that it can satisfy the design requirements for the actual spectroscopic interferometer application by evaluating the design parameters and performances, including the stiffness and disturbance rejection characteristics, etc. In this paper, we present the ultra-small fast steering mirror with the leaf spring mechanism which can reduce the effect of the external disturbance. We proposed the new mechanical structure including the piezoelectric actuator and elastic guide to satisfy the design requirements such as steering angle, steering speed, spring stiffness, and robustness of disturbance to apply the proposed device on a portable spectrometer. By testing the performance after fabrication, it is verified that the proposed ultra-small fast steering mirror is capable of steering motion with its angle of several milliradians and speed of hundreds of Hz. Also, the optical testing result in the laboratory scale test-bed bed shows that the proposed fast steering mirror can compensate the tilting error within 10 arcseconds and can be applied to the actual spectroscopic interferometer in future.

Keywords: Fast steering mirror, Spectroscopic sensor, Disturbance rejection, Moving mirror assembly.

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