banner.jpg 138 A Method for Dimensional and Surface Optical Measurements Uncertainty Assessment on Micro Structured Surfaces Manufactured by Jet-ECM D. Quagliotti1, G. Tosello1, A. M. Islam1, H. N. Hansen1, H. Zeidler2, A. Martin2, A. Schubert2,3, C. Brandao4 and O. Riemer4 1Technical University of Denmark, Department of Manufacturing Engineering, 2800 Kgs. Lyngby, Denmark 2Chemnitz University of Technology, Faculty Mechanical Engineering, Institute for Machine Tools and Production Processes, Professorship of Micromanufacturing Technology, 09107 Chemnitz, Germany 3Fraunhofer Institute for Machine Tools and Forming Technology IWU, 09126 Chemnitz, Germany 4University of Bremen, Laboratory for Precision Machining, 28359 Bremen, Germany ABSTRACT

Surface texture and step height measurements of electrochemically machined cavities have been compared among optical and tactile instruments. A procedure is introduced for correcting possible divergences among the instruments and, ultimately, for evaluating the measurement uncertainty according to the ISO GUM.

Keywords: Step height, Roughness, Micro-machining, Uncertainty, ISO GUM.

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