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<title-group><doi>121</doi>
<article-title>Biprism Interference Micro-Patterning for Periodic Micro-Structure Generation</article-title>
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<author>Ishan Saxena, Jintao Liu, Kornel Ehmann and Jian Cao  </author>

<aff>Department Of Mechanical Engineering, Northwestern University </aff>

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<title>ABSTRACT</title>
<p>We report a novel laser-based surface micro-patterning process for generating periodic micro-features on flat substrates, using a two-faced Fresnel's biprism to generate interference pattern. The biprism with a large apex angle of 178.50 is mounted coaxially with a collimated homogenized beam to create an interference pattern within the region of intersection of two halves of the beam. The pattern periodicity was approximately 17 microns, with feature depths ranging from 1 - 4 microns. The dependence of depth and depth variation on process parameters such as pulse energy and pulse numbers was studied. The proposed process achieves patterning over an area of approximately 4 mm &#x00D7; 8 mm with 1-8 laser pulses, thereby demonstrating a process speed 2-3 orders of magnitude higher than serial-based writing processes.  </p><p><italic>Keywords: </italic>Microtexturing, Two-beam interference, Biprism. </p>
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