In low-pressure abrasive slurry jet machining (ASJM), a slurry jet of fine abrasive particles is used to erode micro-sized features such as holes and channels in a variety of brittle and ductile materials. The present work extended the capability of an existing surface evolution model, previously developed for abrasive air jet machining, by using a CFD model to account for the effects of flow field on particle trajectories and to predict the profile of micro-holes machined in borosilicate glass. The results illustrated that the modified surface evolution model could precisely estimated the nonlinearity trend of depth as a function of machining time and accurately predicted the micro-holes profile with a maximum error of 5% up to a depth of 300 µm.