Mechanical microdrilling can be used to create small holes (<100 µm) in Ti6Al4V for effusion cooling holes in guide vanes/turbine blades. Microdrilling in a difficult-to-machine material requires very high rotational speeds to reduce the chip loads to counter the lack of stiffness of microdrills which can lead to catastrophic tool failure. However, formation of microburrs in microdrilling process is a major impediment. It is expected that vibration-assistance can reduce the burr formation. Consequently, the current work is focused on the characterization of vibration assisted microdrilling. Experiments were conducted at various vibrational frequencies and amplitudes and their effect on burr height and dimensional accuracy of the drilled holes were analyzed using focus variation microscopy. A reduction of 60% in the burr height was observed if workpiece vibration is imparted while microdrilling. The effect of increasing vibrational amplitude was found to produce a positive effect on the dimensional accuracy of the drilled hole.