Multi-Material Micro Manufacture

Proceedings of the 9th International Conference on
Humbert Noll, FOTEC and University of Applied Sciences Wiener Neustadt, Austria
Nadja Adamovic, TU Wien, Austria
Stefan Dimov, Birmingham University, UK

ISBN: 978-981-07-3353-7 (Hardbound)
Pages: 342 pp
Year: 2012

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About the Book
This volume is a compilation of 6 keynote lectures and 61 papers representing the scientific and technical advances in various aspects of advanced micro technologies with respect to a wide range of materials, and the development of new production platforms for micro systems-based products.

Themes addressed include:
Components: Fabrication & Assembly,
Process Modelling & Simulation,
Process Characterisation Including
Process Chains, Metrology: Inspection &
Characterisation, Novel Materials:
Characterisation & Processing, Systems:
Novel Product & Systems Design and

Readership: Engineers, scientists, professionals and academics in the field of nanotechnology and micro manufacture.

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