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DOI		10.3850/978-981-07-0319-6_223
Article		Length Scale Integration: Implementation of a New Process Chain for Producing Replication Masters with Micro and Nano Scale Features
Author(s)		Pierre C. Vella, Stefan S. Dimov, Emmanuel B. Brousseau, Ekaterin Minev, Todor Dobrev, Petko Petkov, Valentina Velkova

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