Combining the PSA (Probabilistic Safety Assessment) and RAMI (Reliability, Availability, Maintainability, Inspectability) approach to simplify the analysis process, integrating safety, reliability and availability assessment for fusion device were considered in this paper. Firstly, a detailed comparative study between PSA and RAMI including analysis purposes, analysis objects, analysis methods and analysis processes has been performed. Then, on the basis of comparison analysis, an integrated analysis approach was proposed, which can be used to evaluate the safety, availability and reliability for fusion device. The IE (Initial Event) in PSA and the component failure in RAMI are regard as disturbance. The ETA (Event Tree Analysis) and FTA (Fault Tree Analysis) in PSA and RBD (Reliability Block Diagram) in RAMI are considered as response to disturbance. Through disturbance and response replacing IE, ETA and RBD, the PSA and RAMI are integrated organically in the new integrated analysis approach. The safety, availability and reliability assessment for fusion device will be more comprehensive and efficient by applying this integrated analysis approach.