Tolerance Verification of an Industrial Assembly Using Computed TomographyAlessandro Stolfi, Leonardo De Chiffre and Francesco Regi
Comparison of Scatterometry, Imaging Scatterometry, AFM and Confocal MicroscopyM. H. Madsen, J. S. Madsen, P. E. Hansen, P. Boher, J. Nygård, D. Dwarakanath and J. F. J 0rgensen
Towards Real Time Effective Dimensional Verification of High Throughput Nano-Embossing ManufacturingM. Calaon, P.Chamberlain, M.H. Madsen, D. Hardt, G. Tosello and H.N. Hansen
Investigation on the Micromilled Surface Characterization Through Replica TechnologyF. Baruffi, P. Parenti, F. Cacciatore, M. Annoni and G. Tosello
Correction of Systematic Behaviour in Topographical Surface AnalysisD. Quagliotti, F. Baruffi, G. Tosello, S. Gasparin, M. Annoni, P. Parenti, R. Sobiecki and H. N. Hansen
