doi: 10.3850/978-981-11-0749-8_KN2
Solid-State Electrochemical Nanopatterning of Silver and Copper
Kyle Jacob, Shama Barna and Placid M. Ferreira
University of Illinois at Urbana-Champaign, Urbana, Illinois, 61801, USA
Abstract
Metallic nanostructures are a critical component in many micro- and nanoscale technologies, including nano-electronics, chemical sensing and sub-wavelength optics. Such structures are generally fabricated using indirect patterning techniques, resulting in expensive, lengthy, multi-step manufacturing operations. Here, we introduce a set of processes that exploit electrochemical transport in superionic conductors to achieve single-step, all solid-state nanopatterning of metals like silver and copper. Three processes, superionic stamping (or imprinting), electron beam direct writing and coloration, and tip-based direct writing are discussed in this paper.
Keywords: Nanopatterning, Electrochemistry, Superionic conductors, Nanoimprinting, Direct-writing.
