doi: 10.3850/978-981-11-0749-8_738
Correction of Systematic Behaviour in Topographical Surface Analysis
D. Quagliotti1, F. Baruffi12, G. Tosello1, S. Gasparin3, M. Annoni2, P. Parenti2, R. Sobiecki1 and H. N. Hansen1
1Technical University of Denmark, Department of Mechanical Engineering, Kgs. Lyngby, Denmark
2Politecnico di Milano, Dipartimento di Ingegneria Meccanica, Milan, Italy
3The LEGO Group, Billund, Denmark
Abstract
Four specimens in the sub-micrometre range and with different polishing were topographically investigated in five areas over their respective surfaces. Uncertainties were evaluated with and without correction for systematic behaviour and successively analysed by a design of experiment (DOE). Results showed that the correction for systematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate to completely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.
Keywords: Systematics, Systematic effects, Surface analysis, Topography, DOE.
