doi: 10.3850/978-981-11-0749-8_714
Fabrication of Micro DLC-Nozzles by Plasma Oxidation Printing
Tatsuhiko Aizawa1, Kenji Wasa2 and Hiroshi Tamagaki3
1Department pf Engineering and Design, Shibaura Institute of Technology
2TEC-DIA, Co. Ltd.
3KOBELCO, Co. Ltd
Abstract
The plasma oxidation printing was proposed to make micro-texturing into the DLC (diamond-like carbon) coatings on the metallic dies and molds. Thick DLC coating method was developed to prepare for the initial DLC-coated mold and die substrates. The maskless micro-patterning methods with aid of the lithography was employed to draw the two-dimensional micro-patterns onto the thick DLC films. High density plasma oxidation method was further utilized to make anisotropic etching and to chemically remove the un-printed DLC films. This anisotropic etching process was described by experiments; high etching rate was attained for its application to formation of fine micro-DLC nozzles.
Keywords: DLC films, Plasma oxidation, Plasma printing, Maskless patterning, Platinum deposition, Metallic-MEMS/NEMS, Selective etching, Micro and nano-texturing
