doi: 10.3850/978-981-11-0749-8_700
Study on the Fabrication of Hierarchical Structure Using a Micro Pyramidal Tip with Revolving Trajectory
Bo Xue1,2, Yongda Yan1,2,a and Xuesen Zhao2
1The State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang 150008, P. R. China
ayanyongda@hit.edu.cn
2Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, P. R. China
Abstract
This study proposed a processing method for the hierarchical structure based on the V-shaped groove. A novel machining system was set up: a pyramidal tip usually used for nanoindentation was driven by two piezo actuators to do revolving motions. Meanwhile, the system can achieve the control of the revolving trajectory and tip’s orientation. The revolving trajectory was introduced on basis of the traditional scratches (face-forward and edgeforward). By designing the collocation of the revolution and the orientation of tip to the feeding direction, three kinds of hierarchical structures have been obtained. The primary microstructure is the V-groove with or without pile-ups at two sides, and the secondary nanostructure is the texture on the surface of sidewall. The consistency of texture from the groove’s top to the bottom and the texture periodicity along the groove have been analyzed.
Keywords: Micro-machining, Tip-based revolving scratch, The hierarchical structure.
